ForschungPublikationen
Electrical feed through for tool integrated high temperature applications

Electrical feed through for tool integrated high temperature applications

Kategorien Konferenz (reviewed)
Jahr 2017
Autoren Dencker F, Kolodziejczyk F, Wurz MC
Veröffentlicht in International Conference and Exhibition on Integration Issues of Miniaturized Systems 2017, SSI 2017
ISBN 978-395735057-2