Institut für Mikroproduktionstechnik Forschung Publikationen
Resistance of Multilayer Diamond-like Carbon (DLC) Coatings for MEMS Applications against Oscillating Wear

Development, Characterisation and High-Temperature Suitability of Thin-Film Strain Gauges Directly Deposited with a New Sputter Coating System

Kategorien Zeitschriften/Aufsätze (reviewed)
Jahr 2020
Autoren Klaas D, Ottermann R, Dencker F, Wurz MC
Veröffentlicht in MDPI Sensors
DOI 10.3390/s20113294